Adaptive Optics • Deformable Mirrors • Wavefront Sensors • Hartmannometers

Stack actuators deformable mirrors : for high order aberrations correction

Stack actuators deformable mirrors are made by gluing Piezoceramic columns – called actuators - to a thin sheet of glass, covered with a reflective coating. The mirror is bended when the actuators are polarized, the orientation of the bending depending on the voltage polarity.

Stack actuators deformable mirrors are the bestsellersfor high resolution imaging
and in general for high order aberrations correction in laser & imaging (Zernike coefficient > 24).

High Order Correction	Large Stroke	High Speed	Versatile
Stack actuator deformable mirrors can have a high density of actuators with a small inter-actuator space, so they are well adapted to high order aberration corrections (Z >>24).	Piezoelectric actuators have the largest stroke – standard is 10 µm and the largest inter-actuator stroke – standard is 2 µm.	Stack actuator deformable mirrors can operate at the highest speed - up to 1 kHz and have a large 1st resonance frequency - up to 15 kHz.	The technology can use any kind of substrate with any kind of coating, so it can cover the full spectral range from X-Rays to far IR.

We have an experience with a large range of stack actuator deformable mirrors:

Active Diameter	10 – 100 mm
Number of actuators	Up to 512
Actuator size	Up to 10 mm
Inter actuator stroke	Up to 2 µm
Frequency	Up to 1 kHz (1st resonance @ 15 kHz)
Mirror Substrate	Glass, Silicon, Copper, Piezoceramic…
Coating	Metallic, Dielectric, Laser Damage up to 20 J/cm2 (ns pulses)
Spectral range	122 nm (Far UV) to 10.6 µm (far IR)

Stack actuators deformable mirrors : for high order aberrations correction

Stack actuators deformable mirrors are the bestsellersfor high resolution imaging and in general for high order aberrations correction in laser & imaging (Zernike coefficient > 24).

High Order Correction

Large Stroke

High Speed

Versatile

Stack actuator deformable mirrors can have a high density of actuators with a small inter-actuator space, so they are well adapted to high order aberration corrections (Z >>24).

Piezoelectric actuators have the largest stroke – standard is 10 µm and the largest inter-actuator stroke – standard is 2 µm.

Stack actuator deformable mirrors can operate at the highest speed - up to 1 kHz and have a large 1st resonance frequency - up to 15 kHz.

The technology can use any kind of substrate with any kind of coating, so it can cover the full spectral range from X-Rays to far IR.

We have an experience with a large range of stack actuator deformable mirrors:

Stack actuators deformable mirrors are the bestsellersfor high resolution imaging
and in general for high order aberrations correction in laser & imaging (Zernike coefficient > 24).